测试硬件简介－－－探针卡(prober card)

探针卡(prober card) 是晶圆测试(wafer test)中被测芯片和测试机之间的接口.
探针卡对前期测试的开发及后期量产测试的良率的保证都非常重要.
一.下面介绍一常见的几类探针卡。

1.Blade Type : Under 70 pins,low speed
　LOW CURRENT PROBING
PROBING AT EXTREME TEMPERATURES: > 200ºC
RF PROBING: > 3 GHZ
Low cost
Lead time 1 day
刀片式:结构稳定,抗干扰性好,可用于RF测试。

2.Epoxy Type ; <1000pins
Large Array /Multi-DUT Probing
Tight Pitch Applications
High Temperature Applications
Lead time 4 weeks for new design
Repeat order 2 weeks
环氧树脂(悬臂式):比较流行的一种卡,针间的pitch可以做的很小,
同一张卡里针的数量也做的比较多.

3.Vertical Type: >1000 pins or high speed
Multi-DUT Probing
Parallel and Grid Array Probing Capacities
High Accuracy
High Contact Quality
By 32 parallel or above
Lead time 10-12 weeks for new design
垂直式:一张卡了可以做的针的数量非常多，可以做几千个针。针定位精确，
和芯片上pad的接触效果好.
二.探针卡主要的供应商.
Company Location
K&S US/TW/China
Cascade US
WWL US
FormFactor US
Probe2000 US
JEM Japan
MJC Japan
TCL Japan/China
Thicom Korea
Siprox TW
Probe Technology TW
KTTI TW
爱普升 TW
Microprobe TW
MPI TW
METEK TW
MMS (MJC and MPI ) Shanghai
Kimpsion Corp. TW
Shanghai Yiyuan Shanghai
NPCL CMAI TW