芯片污染检测/总结

对各种污染形式的检测在第八章和第十四章中具体描述。表5.35总结了有关洁净室洁净度的规范。

Year of Production 2001 2006 2012
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Line width (nm) 150 100 50
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Air Critical Particle Size (nm) 8 2 1
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Water oxidizable carbon (ppb) 1 <1 <1
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Water Dissolved Oxygen (ppb) 1-10 1 1
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Water Particle>critical size <0.2 per ml <0.2 per ml <0.2 per ml
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Liquid Particles>critical size <0.5 per ml <0.5 per ml <0.5 per ml
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HCl, H2O impurities (ppt) <1000 <1000 <1000
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BEOL solvents K, Li, Na (ppt each) <1000 <1000 <1000
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POU Gases particles (per liter) 2 2 2

表5.35 SIA Roadmap Projections (Micro October 1998 p.54)