April 24, 2007--Aviza Technology, Inc. (NASDAQ:AVZA), a supplier of advanced
semiconductor capital equipment and process technologies for the
global semiconductor industry and related markets, today announced that it received a multi-system, multi-chamber order for its Celsior(TM) single-wafer, atomic layer deposition (ALD) system from a leading foundry in Taiwan. The foundry, a new ALD customer for Aviza, plans to utilize
the Celsior(TM)
systems for high-volume DRAM device production at the 90-nm and below geometries. The
tools will help support the foundrys
technology requirements and capacity targets for its 300-mm fab.
Avizas Celsior ALD system continues to gain acceptance at worldwide fabs in Taiwan, China, Europe and the U.S. as the process tool of record for 90-nm and below DRAM device manufacturing, specifically for advanced trench
capacitor structures. In Taiwan, Celsior has been selected by multiple customers for high volume production at their respective 300-mm manufacturing sites.
"We are very pleased to have received this multi-system order from this foundry customer, which also marks a new ALD customer win for Aviza, enabling the company to further expand its
global presence and increase its ALD market penetration," said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc. "This order was a result of Avizas ability to demonstrate its expertise and experience with high-volume ALD production to enable advanced DRAM device manufacturing."
About Celsior
The award winning Celsior system features an innovative chamber, which offers increased throughput, low chemical consumption and extended process window -- resulting in low cost of ownership. Celsiors patented showerhead is designed to meet the stringent ALD process needs, with the capability of achieving less than 1 percent thickness uniformity requirements across a 300-mm wafer. The tool leverages a small reaction chamber utilizing Avizas patent pending computer modeled gas flow dynamics to reduce the reaction volume and remove empty spaces, reducing the areas available for defect formation resulting in higher die yields. Celsior is based on a reliable, field proven platform uti
lized across all Aviza single wafer
systems, including PVD, CVD and etch. This platform includes a robust transfer hub and high-efficiency control system -- translating into higher system uptime and availability. Celsior is extendible, allowing the seamless addition of process chambers for adding future capacity or new
technology.